IRIS publication 232444527
Preparation of substrates intended for the growth of lower threading dislocation densities within nitride based UV multiple quantum wells
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TY - CONF - Conroy, M. A.; Petkov, N.; Li, H. N.; Sadler, T. C.; Zubialevich, V.; Holmes, J. D.; Parbrook, P. J. - ECS Transactions - Preparation of substrates intended for the growth of lower threading dislocation densities within nitride based UV multiple quantum wells - 2013 - October - Published - 1 - () - Vol. 53(2) - 39 - 42 - Toronto, ON, Canada - 12-MAY-13 - 16-MAY-13 - In this study a variety of nano-patterning techniques were applied to III-N device fabrication. A block co-polymer/metal oxide novel surface texturing method was utilised to achieve a long ranged ordered template. Nano-sphere lithography was also applied to UV multiple quantum well (MQW) structural growth using a silica nanoparticle monolayer as the mask. The monolayer was produced by a self-assembly technique without the need for either a spin coater or Langmuir-Blodgett trough resulting in a low cost arrangement. Using these nano-sized masks allows for the production of nano-rods in a much simpler method than previously used techniques. For comparison nano-rods were made by electron beam lithography at various diameters and lengths for a comprehensive investigation of crystal defects, in particular threading dislocations (TDs). - http://ecst.ecsdl.org/ - 10.1149/05302.0039ecst DA - 2013/10 ER -
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@inproceedings{V232444527, = {Conroy, M. A. and Petkov, N. and Li, H. N. and Sadler, T. C. and Zubialevich, V. and Holmes, J. D. and Parbrook, P. J.}, = {ECS Transactions}, = {{Preparation of substrates intended for the growth of lower threading dislocation densities within nitride based UV multiple quantum wells}}, = {2013}, = {October}, = {Published}, = {1}, = {()}, = {Vol. 53(2) }, pages = {39--42}, = {Toronto, ON, Canada}, month = {May}, = {16-MAY-13}, = {{In this study a variety of nano-patterning techniques were applied to III-N device fabrication. A block co-polymer/metal oxide novel surface texturing method was utilised to achieve a long ranged ordered template. Nano-sphere lithography was also applied to UV multiple quantum well (MQW) structural growth using a silica nanoparticle monolayer as the mask. The monolayer was produced by a self-assembly technique without the need for either a spin coater or Langmuir-Blodgett trough resulting in a low cost arrangement. Using these nano-sized masks allows for the production of nano-rods in a much simpler method than previously used techniques. For comparison nano-rods were made by electron beam lithography at various diameters and lengths for a comprehensive investigation of crystal defects, in particular threading dislocations (TDs).}}, = {http://ecst.ecsdl.org/}, = {10.1149/05302.0039ecst}, source = {IRIS} }
Data as stored in IRIS
AUTHORS | Conroy, M. A.; Petkov, N.; Li, H. N.; Sadler, T. C.; Zubialevich, V.; Holmes, J. D.; Parbrook, P. J. | ||
TITLE | ECS Transactions | ||
PUBLICATION_NAME | Preparation of substrates intended for the growth of lower threading dislocation densities within nitride based UV multiple quantum wells | ||
YEAR | 2013 | ||
MONTH | October | ||
STATUS | Published | ||
PEER_REVIEW | 1 | ||
TIMES_CITED | () | ||
SEARCH_KEYWORD | |||
EDITORS | Vol. 53(2) | ||
START_PAGE | 39 | ||
END_PAGE | 42 | ||
LOCATION | Toronto, ON, Canada | ||
START_DATE | 12-MAY-13 | ||
END_DATE | 16-MAY-13 | ||
ABSTRACT | In this study a variety of nano-patterning techniques were applied to III-N device fabrication. A block co-polymer/metal oxide novel surface texturing method was utilised to achieve a long ranged ordered template. Nano-sphere lithography was also applied to UV multiple quantum well (MQW) structural growth using a silica nanoparticle monolayer as the mask. The monolayer was produced by a self-assembly technique without the need for either a spin coater or Langmuir-Blodgett trough resulting in a low cost arrangement. Using these nano-sized masks allows for the production of nano-rods in a much simpler method than previously used techniques. For comparison nano-rods were made by electron beam lithography at various diameters and lengths for a comprehensive investigation of crystal defects, in particular threading dislocations (TDs). | ||
FUNDED_BY | * | ||
URL | http://ecst.ecsdl.org/ | ||
DOI_LINK | 10.1149/05302.0039ecst | ||
FUNDING_BODY | |||
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