¿Advanced Test Structure Design for Dielectric Characterization of High-K Material¿

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TY  - CONF
  - O¿Sullivan, J.A., Chen, W., McCarthy, K.G., Crean, G.M
  - IEEE International Conference on Microelectronic Test Structures
  - ¿Advanced Test Structure Design for Dielectric Characterization of High-K Material¿
  - 2008
  - March
  - Validated
  - 1
  - ()
  - 180
  - 184
  - 24-FEB-07
  - 25-FEB-07
DA  - 2008/03
ER  - 
@inproceedings{V26999526,
   = {O¿Sullivan,  J.A. and  Chen,  W. and  McCarthy,  K.G. and  Crean,  G.M },
   = {IEEE International Conference on Microelectronic Test Structures},
   = {{¿Advanced Test Structure Design for Dielectric Characterization of High-K Material¿}},
   = {2008},
   = {March},
   = {Validated},
   = {1},
   = {()},
  pages = {180--184},
  month = {Feb},
   = {25-FEB-07},
  source = {IRIS}
}
AUTHORSO¿Sullivan, J.A., Chen, W., McCarthy, K.G., Crean, G.M
TITLEIEEE International Conference on Microelectronic Test Structures
PUBLICATION_NAME¿Advanced Test Structure Design for Dielectric Characterization of High-K Material¿
YEAR2008
MONTHMarch
STATUSValidated
PEER_REVIEW1
TIMES_CITED()
SEARCH_KEYWORD
EDITORS
START_PAGE180
END_PAGE184
LOCATION
START_DATE24-FEB-07
END_DATE25-FEB-07
ABSTRACT
FUNDED_BY
URL
DOI_LINK
FUNDING_BODY
GRANT_DETAILS