TY  - JOUR
  - MacSweeney, D and McCarthy, KG and Floyd, L and Duane, R and Hurley, P and Power, JA and Kelly, SC and Mathewson, A
  - 2003
  - January
  - IEEE Transactions on Semiconductor Manufacturing
  - SPECIAL SECTION ON THE INTERNATIONAL CONFERENCE ON MICROELECTRONICS TEST STRUCTURES-SPECIAL SECTION PAPERS-Improving the Accuracy and Efficiency of Junction Capacitance Characterization
  - Published
  - ()
  - 16
  - 2
  - 207
  - 214
DA  - 2003/01
ER  - 

@article{V276842321,
   = {MacSweeney, D and McCarthy, KG and Floyd, L and Duane, R and Hurley, P and Power, JA and Kelly, SC and Mathewson, A},
   = {2003},
   = {January},
   = {IEEE Transactions on Semiconductor Manufacturing},
   = {SPECIAL SECTION ON THE INTERNATIONAL CONFERENCE ON MICROELECTRONICS TEST STRUCTURES-SPECIAL SECTION PAPERS-Improving the Accuracy and Efficiency of Junction Capacitance Characterization},
   = {Published},
   = {()},
   = {16},
   = {2},
  pages = {207--214},
  source = {IRIS}
}