Improving the Accuracy and Efficiency of Junction Capacitance Characterization: Strategies for Probing Configuration and Data Set Size

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TY  - JOUR
  - MacSweeney,D.; McCarthy,K.G.; Floyd,L.; Duane,R.; Hurley, P.; Power, J.A.; Kelly, S.C.; Mathewson, A.
  - 2003
  - May
  - IEEE Transactions on Semiconductor Manufacturing
  - Improving the Accuracy and Efficiency of Junction Capacitance Characterization: Strategies for Probing Configuration and Data Set Size
  - Published
  - ()
  - 16
  - 2
  - 207
  - 214
DA  - 2003/05
ER  - 
@article{V343490,
   = {MacSweeney,D. and  McCarthy,K.G. and  Floyd,L. and  Duane,R. and  Hurley, P. and  Power, J.A. and  Kelly, S.C. and  Mathewson, A.},
   = {2003},
   = {May},
   = {IEEE Transactions on Semiconductor Manufacturing},
   = {Improving the Accuracy and Efficiency of Junction Capacitance Characterization: Strategies for Probing Configuration and Data Set Size},
   = {Published},
   = {()},
   = {16},
   = {2},
  pages = {207--214},
  source = {IRIS}
}
AUTHORSMacSweeney,D.; McCarthy,K.G.; Floyd,L.; Duane,R.; Hurley, P.; Power, J.A.; Kelly, S.C.; Mathewson, A.
YEAR2003
MONTHMay
JOURNAL_CODEIEEE Transactions on Semiconductor Manufacturing
TITLEImproving the Accuracy and Efficiency of Junction Capacitance Characterization: Strategies for Probing Configuration and Data Set Size
STATUSPublished
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VOLUME16
ISSUE2
START_PAGE207
END_PAGE214
ABSTRACT
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EDITION
URL
DOI_LINK
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