TY  - CONF
  - Chen, W., McCarthy, K.G., Mathewson, A.
  - IEEE International Conference on Microelectronic Test Structures
  - Practical Considerations for Measurement of Test Structures for Dielectric Characterization
  - 2009
  - April
  - Validated
  - 1
  - ()
  - 221
  - 225
  - Oxnard
  - 30-MAR-09
  - 02-APR-09
DA  - 2009/04
ER  - 

@inproceedings{V68097286,
   = {Chen,  W. and  McCarthy,  K.G. and  Mathewson,  A. },
   = {IEEE International Conference on Microelectronic Test Structures},
   = {{Practical Considerations for Measurement of Test Structures for Dielectric Characterization}},
   = {2009},
   = {April},
   = {Validated},
   = {1},
   = {()},
  pages = {221--225},
   = {Oxnard},
  month = {Mar},
   = {02-APR-09},
  source = {IRIS}
}