US Patent Issued to SAMSUNG ELECTRONICS, PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION on Aug. 22 for "Inductively coupled plasma processing apparatus" (South Korean Inventors)

Press/Media

Period	23 Aug 2023

Media coverage

Title	US Patent Issued to SAMSUNG ELECTRONICS, PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION on Aug. 22 for "Inductively coupled plasma processing apparatus" (South Korean Inventors)
Media name/outlet	US Fed News
Country/Territory	United States
Date	23/08/23
URL	metabase.moreover.com/noarticleurl?type=psh&lni=690V-HNM1-JDKC-R3HD-00000-00
Persons	Jun Su Lee