Description
This repository and dataset accompany the manuscript, containing the source code, input parameters, simulation outputs, and analysis scripts required to reproduce the results:
"Control of Cu morphology on TaN barrier and combined Ru-TaN barrier/liner substrates for nanoscale interconnects from atomistic kinetic Monte Carlo simulations"
Authors: Samuel Aldana, Cara-Lena Nies and Michael Nolan
Journal: Nanoscale, Royal Society of Chemistry
"Control of Cu morphology on TaN barrier and combined Ru-TaN barrier/liner substrates for nanoscale interconnects from atomistic kinetic Monte Carlo simulations"
Authors: Samuel Aldana, Cara-Lena Nies and Michael Nolan
Journal: Nanoscale, Royal Society of Chemistry
| Date made available | 21 Mar 2026 |
|---|---|
| Publisher | Zenodo |
Research output
- 1 Article
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Control of Cu morphology on TaN barrier and combined Ru-TaN barrier/liner substrates for nanoscale interconnects from atomistic kinetic Monte Carlo simulations
Aldana, S., Nies, C.-L. & Nolan, M., 11 Apr 2025, In: Nanoscale. 17, 19, p. 12450-12464 15 p.Research output: Contribution to journal › Article › peer-review
Open Access
Datasets
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Github repository: Kinetix
Aldana, S. (Creator), GitHUB, 26 Feb 2025
https://github.com/aldanads/Kinetix
Dataset
Cite this
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