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kMC simulations for publication "Control of Cu morphology on TaN barrier and combined Ru-TaN barrier/liner substrates for nanoscale interconnects from atomistic kinetic Monte Carlo simulations""

Dataset

Description

This repository and dataset accompany the manuscript, containing the source code, input parameters, simulation outputs, and analysis scripts required to reproduce the results:
"Control of Cu morphology on TaN barrier and combined Ru-TaN barrier/liner substrates for nanoscale interconnects from atomistic kinetic Monte Carlo simulations"
Authors: Samuel Aldana, Cara-Lena Nies and Michael Nolan
Journal: Nanoscale, Royal Society of Chemistry
Date made available21 Mar 2026
PublisherZenodo

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