Personal profile
Biography
I am Group Head of the Materials Modelling for Devices Group at Tyndall, CMOS++ Research Cluster Lead and member of Tyndall's Senior Leadership team. Our expertise focuses on atomistic simulation of surface chemistry, with a particular focus on simulation of atomic level processing, including atomic layer deposition, atomic layer etching and hybrid materials (molecular layer deposition and sequential infiltration synthesis). We have used first principles density functional theory (DFT) and recently started with molecular dynamics and machine learning.
We work with many leading European and international research groups to explore new precursor chemistries for ALD/ALD/MLD, surface chemistries in processing to predict and understand new materials processing chemistries.
I am a PI on the Chips JU Pilot Line NanoIC working on p-type oxide semiconductors, ALD and contact metals. Other projects where I am PI include Chips JU funded GENESIS on sustainable semiconductor processing, Semiconductor Research Corporation with Intel on ALE and an AMBER Centre project on low friction materials.
Research Interests
Atomic layer deposition of metals using plasma processing
Atomic layer etching of high-k metals oxides with HF - role of phase and surface facet on ALE chemistry
Alternatives to HF for oxide ALE
Metal ALE
Hybrid ALD/MLD chemistry for inorganic-organic materials
Sequential infiltration synthesis of hybrid materials
Simulation methodology for metal morphology prediction - interconnect materials
PFAS sensors
Machine learning for activation barriers
Teaching Activities
I previously taught in two modules in UCC School of Chemistry:
Structure, bonding and quantum mechanics.
Interfaces, Microscopy and Modelling.
Current PhD Students
Michael Sweetman
Saba Abdul Shakoor
Florentino Silva (co-supervised with L. Keeney)
Debismitta Dutta
(co-supervised with L. Keeney)
Recent PhD Students
Rita Mullins
Arbresha Muriqi
Cara-Lena Nies
Stephen Rhatigan
Drahomir Chovan
Merid Legesse
Anna Iwaszuk
PhD Supervision
- Available for PhD supervision
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Collaborations and top research areas from the last five years
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Near Room-Temperature Atomic Layer Deposition of Magnesium Oxide Using Bis-3-(N,N-dimethylamino)propyl Magnesium(II) and Water
Nolan, M., 2025, In: Journal of the American Chemical Society.Research output: Contribution to journal › Article › peer-review
Open Access -
Predicting the morphology of cobalt, copper, and ruthenium on TaN for interconnect metal deposition
Rönnby, K. & Nolan, M., 28 Jun 2025, In: Journal of Chemical Physics. 162, 24, 244704.Research output: Contribution to journal › Article › peer-review
Open Access -
A first-principles study of the reactivity and layer-dependent properties of phosphorene
Shakoor, S. A. & Nolan, M., 12 Jan 2026, In: Nanotechnology. 37, 2Research output: Contribution to journal › Article › peer-review
Open Access -
A Liquid Ge(IV) Precursor for Low Temperature Plasma Enhanced Atomic Layer Deposition of Germanium Oxide Thin Films
Preischel, F., Rönnby, K., Wilken, M., Glauber, J. P., Froeschke, S., Rogalla, D., Gemming, T., Popov, A. A., Dement, P., Nolan, M. & Devi, A., 2026, (Accepted/In press) In: Small.Research output: Contribution to journal › Article › peer-review
Open Access
Press/Media
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Tyndall researchers receive €27.5m in Research Ireland funding
Nolan, M., Wasiewska, L., Russell, E. & Ozcan Atar, A.
28/11/24
1 item of Media coverage
Press/Media
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Tyndall National Institute Researchers Awarded Prestigious Research Ireland Funding
Nolan, M., Wasiewska, L., Russell, E. & Ozcan Atar, A.
16/11/24
1 item of Media coverage
Press/Media
Datasets
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kMC simulations for publication "Control of Cu morphology on TaN barrier and combined Ru-TaN barrier/liner substrates for nanoscale interconnects from atomistic kinetic Monte Carlo simulations""
Aldana, S. (Creator), Nies, C. L. (Contributor) & Nolan, M. (Supervisor), Zenodo, 21 Mar 2026
DOI: 10.5281/zenodo.19151596, https://doi.org/10.1039/D4NR04505J and one more link, https://doi.org/10.48550/arXiv.2410.06133 (show fewer)
Dataset
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kMC simulations for publication "Control of Growth Morphology of Deposited fcc Metals through Tuning Substrate–Metal Interactions"
Aldana, S. (Creator) & Nolan, M. (Supervisor), Zenodo, 7 Mar 2026
DOI: 10.5281/zenodo.18898755, https://doi.org/10.1021/acsami.5c18081 and one more link, https://doi.org/10.48550/arXiv.2508.21492 (show fewer)
Dataset