| Original language | English (Ireland) |
|---|---|
| Number of pages | 5 |
| Volume | 681 |
| Publication status | Published - 2006 |
Publication series
| Name | NSK technical journal |
|---|
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圧電 MEMS デバイスの超精密研削加工精度向上への機械設計的アプローチ
- S. Arai
- , John Corbett
- , Roger Whatmore
Research output: Other output › peer-review