128 × 128 silicon photonic MEMS switch package using glass interposer and pitch reducing fibre array

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Abstract

We design and fabricate the packaging of 128 × 128 silicon photonic MEMS switch device using through glass via (TGV) interposer and pitch reducing fibre array. The switch device contains 16384 MEMS switch cells and 272 grating couplers spaced at 63.5 μm in a compact footprint of 17.4 mm × 16 mm. The apodised grating couplers designed for 1300 nm have an insertion loss of 2.5 dB/facet at 10° coupling angle. The 0.5 mm thick glass interposer contains 512 electrical vias while the pitch reducing optical coupling array is polished to 40° for planar coupling.

Original languageEnglish
Title of host publication2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781538630426
DOIs
Publication statusPublished - 2 Jul 2017
Event2017 19th IEEE Electronics Packaging Technology Conference, EPTC 2017 - Singapore, Singapore
Duration: 6 Dec 20179 Dec 2017

Publication series

Name2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017
Volume2018-February

Conference

Conference2017 19th IEEE Electronics Packaging Technology Conference, EPTC 2017
Country/TerritorySingapore
CitySingapore
Period6/12/179/12/17

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