A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits

Pierre Edinger; Alain Yuji Takabayashi; Carlos Errando-Herranz; Umar Khan; Cleitus Antony; Giuseppe Talli; Peter Verheyen; Wim Bogaerts; Niels Quack; Kristinn B. Gylfason

doi:10.1109/MEMS51670.2022.9699739

A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits

Pierre Edinger
, Alain Yuji Takabayashi
, Carlos Errando-Herranz
, Umar Khan
, Cleitus Antony
, Giuseppe Talli
, Peter Verheyen
, Wim Bogaerts
, Niels Quack
, Kristinn B. Gylfason

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

Abstract

Silicon photonic circuits are rapidly growing in complexity and spreading to new applications. However, programmable circuits consume much power and require active electrical interfaces. For the first time, we demonstrate a nonvolatile photonic MEMS p-phase switch using dual comb-drive actuation and adhesion forces, implemented in a silicon photonics foundry. Both nonvolatile states are low-loss, display low dispersion, could be cycled through over 100 times, and have retention times over 12 hours. We believe that the demonstrated nonvolatility combined with excellent optical performance can enable a new generation of programmable photonic chips that do not consume any electrical power once (re)configured.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	995-997
Number of pages	3
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699739
Publication status	Published - 2022
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2022-January
ISSN (Print)	1084-6999

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	9/01/22 → 13/01/22

Keywords

MEMS latching
nonvolatile photonics
phase shifter
photonic MEMS
Silicon photonics

Access to Document

10.1109/MEMS51670.2022.9699739

Cite this

Edinger, P., Takabayashi, A. Y., Errando-Herranz, C., Khan, U., Antony, C., Talli, G., Verheyen, P., Bogaerts, W., Quack, N., & Gylfason, K. B. (2022). A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 995-997). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51670.2022.9699739

Edinger, Pierre ; Takabayashi, Alain Yuji ; Errando-Herranz, Carlos et al. / A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits. 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. pp. 995-997 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inbook{ca86418e31b844a48552de9fb206a9fe,

title = "A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits",

abstract = "Silicon photonic circuits are rapidly growing in complexity and spreading to new applications. However, programmable circuits consume much power and require active electrical interfaces. For the first time, we demonstrate a nonvolatile photonic MEMS p-phase switch using dual comb-drive actuation and adhesion forces, implemented in a silicon photonics foundry. Both nonvolatile states are low-loss, display low dispersion, could be cycled through over 100 times, and have retention times over 12 hours. We believe that the demonstrated nonvolatility combined with excellent optical performance can enable a new generation of programmable photonic chips that do not consume any electrical power once (re)configured.",

keywords = "MEMS latching, nonvolatile photonics, phase shifter, photonic MEMS, Silicon photonics",

author = "Pierre Edinger and Takabayashi, \{Alain Yuji\} and Carlos Errando-Herranz and Umar Khan and Cleitus Antony and Giuseppe Talli and Peter Verheyen and Wim Bogaerts and Niels Quack and Gylfason, \{Kristinn B.\}",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

year = "2022",

doi = "10.1109/MEMS51670.2022.9699739",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "995--997",

booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",

address = "United States",

}

Edinger, P, Takabayashi, AY, Errando-Herranz, C, Khan, U, Antony, C, Talli, G, Verheyen, P, Bogaerts, W, Quack, N & Gylfason, KB 2022, A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2022-January, Institute of Electrical and Electronics Engineers Inc., pp. 995-997, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699739

A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits. / Edinger, Pierre; Takabayashi, Alain Yuji; Errando-Herranz, Carlos et al.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 995-997 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

TY - CHAP

T1 - A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits

AU - Edinger, Pierre

AU - Takabayashi, Alain Yuji

AU - Errando-Herranz, Carlos

AU - Khan, Umar

AU - Antony, Cleitus

AU - Talli, Giuseppe

AU - Verheyen, Peter

AU - Bogaerts, Wim

AU - Quack, Niels

AU - Gylfason, Kristinn B.

PY - 2022

Y1 - 2022

N2 - Silicon photonic circuits are rapidly growing in complexity and spreading to new applications. However, programmable circuits consume much power and require active electrical interfaces. For the first time, we demonstrate a nonvolatile photonic MEMS p-phase switch using dual comb-drive actuation and adhesion forces, implemented in a silicon photonics foundry. Both nonvolatile states are low-loss, display low dispersion, could be cycled through over 100 times, and have retention times over 12 hours. We believe that the demonstrated nonvolatility combined with excellent optical performance can enable a new generation of programmable photonic chips that do not consume any electrical power once (re)configured.

AB - Silicon photonic circuits are rapidly growing in complexity and spreading to new applications. However, programmable circuits consume much power and require active electrical interfaces. For the first time, we demonstrate a nonvolatile photonic MEMS p-phase switch using dual comb-drive actuation and adhesion forces, implemented in a silicon photonics foundry. Both nonvolatile states are low-loss, display low dispersion, could be cycled through over 100 times, and have retention times over 12 hours. We believe that the demonstrated nonvolatility combined with excellent optical performance can enable a new generation of programmable photonic chips that do not consume any electrical power once (re)configured.

KW - MEMS latching

KW - nonvolatile photonics

KW - phase shifter

KW - photonic MEMS

KW - Silicon photonics

UR - https://www.scopus.com/pages/publications/85126396299

U2 - 10.1109/MEMS51670.2022.9699739

DO - 10.1109/MEMS51670.2022.9699739

M3 - Chapter

AN - SCOPUS:85126396299

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 995

EP - 997

BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

Y2 - 9 January 2022 through 13 January 2022

ER -

Edinger P, Takabayashi AY, Errando-Herranz C, Khan U, Antony C, Talli G et al. A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. p. 995-997. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51670.2022.9699739

A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this