@inproceedings{74c17291d4604eeda1a0db9801e17440,
title = "A capacitive based piezoelectric AlN film quality test structure",
abstract = "Aluminum nitride (AlN) is a piezoelectric material that is commonly used in various MEMS applications. However, determining the properties of the thin film typically requires multiple test structures, and there are various methods for obtaining the piezoelectric properties. This paper highlights the development of a capacitive based test structure that is capable of determining the different material properties. In addition this paper compares various test methods used to determine the piezoelectric properties of AlN.",
keywords = "Aluminum nitride, Capacitor, MEMS, Piezoelectrics",
author = "Nathan Jackson and Olszewski, \{Oskar Z.\} and Lynette Keeney and Alan Blake and Alan Mathewson",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 2015 IEEE International Conference on Microelectronic Test Structures, ICMTS 2015 ; Conference date: 23-03-2015 Through 26-03-2015",
year = "2015",
month = may,
day = "12",
doi = "10.1109/ICMTS.2015.7106139",
language = "English",
series = "IEEE International Conference on Microelectronic Test Structures",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "193--197",
booktitle = "ICMTS 2015 - Proceedings of the 2015 IEEE International Conference on Microelectronic Test Structures",
address = "United States",
}