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A combined capacitance-voltage and hard x-ray photoelectron spectroscopy characterisation of metal/Al2O3/In0.53Ga 0.47As capacitor structures

  • Jun Lin
  • , Lee Walsh
  • , Greg Hughes
  • , Joseph C. Woicik
  • , Ian M. Povey
  • , Terrance P. O'Regan
  • , Paul K. Hurley
  • Dublin City University
  • National Institute of Standards and Technology
  • U.S. Army Research Laboratory

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