A flexure motion stage system for light beam control

Mehdi Riza; Guangbo Hao

doi:10.1007/s00542-018-4168-8

A flexure motion stage system for light beam control

Mehdi Riza
, Guangbo Hao

School of Engineering and Architecture

University College Cork

Research output: Contribution to journal › Article › peer-review

Abstract

This paper presents the design of an improved tip-tilt-piston compliant/flexure motion stage for steering light beam. The motion stage is actuated by three linear stepper motors in an open-loop control. Using a laser and optical setup, the completed device was tested by making it steer a laser beam, effectively demonstrating its range of movement and level of precision. The testing has proved that the new motion stage system has a maximum bidirectional rotation range of at least 2.89° with a precision and repeatability of 0.0213°, demonstrating a micro-positioning ability.

Original language	English
Pages (from-to)	3185-3191
Number of pages	7
Journal	Microsystem Technologies
Volume	25
Issue number	8
DOIs	https://doi.org/10.1007/s00542-018-4168-8
Publication status	Published - 1 Aug 2019

Access to Document

10.1007/s00542-018-4168-8

https://hdl.handle.net/10468/11197Licence: CC BY-NC-ND

Cite this

@article{b171cf93950b4ccabe12e3a878398120,

title = "A flexure motion stage system for light beam control",

abstract = "This paper presents the design of an improved tip-tilt-piston compliant/flexure motion stage for steering light beam. The motion stage is actuated by three linear stepper motors in an open-loop control. Using a laser and optical setup, the completed device was tested by making it steer a laser beam, effectively demonstrating its range of movement and level of precision. The testing has proved that the new motion stage system has a maximum bidirectional rotation range of at least 2.89° with a precision and repeatability of 0.0213°, demonstrating a micro-positioning ability.",

author = "Mehdi Riza and Guangbo Hao",

note = "Publisher Copyright: {\textcopyright} 2018, Springer-Verlag GmbH Germany, part of Springer Nature.",

year = "2019",

month = aug,

day = "1",

doi = "10.1007/s00542-018-4168-8",

language = "English",

volume = "25",

pages = "3185--3191",

journal = "Microsystem Technologies",

issn = "0946-7076",

publisher = "Springer Science and Business Media Deutschland GmbH",

number = "8",

}

TY - JOUR

T1 - A flexure motion stage system for light beam control

AU - Riza, Mehdi

AU - Hao, Guangbo

PY - 2019/8/1

Y1 - 2019/8/1

N2 - This paper presents the design of an improved tip-tilt-piston compliant/flexure motion stage for steering light beam. The motion stage is actuated by three linear stepper motors in an open-loop control. Using a laser and optical setup, the completed device was tested by making it steer a laser beam, effectively demonstrating its range of movement and level of precision. The testing has proved that the new motion stage system has a maximum bidirectional rotation range of at least 2.89° with a precision and repeatability of 0.0213°, demonstrating a micro-positioning ability.

AB - This paper presents the design of an improved tip-tilt-piston compliant/flexure motion stage for steering light beam. The motion stage is actuated by three linear stepper motors in an open-loop control. Using a laser and optical setup, the completed device was tested by making it steer a laser beam, effectively demonstrating its range of movement and level of precision. The testing has proved that the new motion stage system has a maximum bidirectional rotation range of at least 2.89° with a precision and repeatability of 0.0213°, demonstrating a micro-positioning ability.

UR - https://www.scopus.com/pages/publications/85055186062

U2 - 10.1007/s00542-018-4168-8

DO - 10.1007/s00542-018-4168-8

M3 - Article

AN - SCOPUS:85055186062

SN - 0946-7076

VL - 25

SP - 3185

EP - 3191

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 8

ER -

A flexure motion stage system for light beam control

Abstract

Access to Document

Other files and links

Fingerprint

Cite this