A Large Range X-Y Parallel Micro-motion System with Optical Encoder Displacement Feedback

Zhiming Zhang; Guangbo Hao; Peng Yan

doi:10.1109/3M-NANO.2018.8552209

A Large Range X-Y Parallel Micro-motion System with Optical Encoder Displacement Feedback

Zhiming Zhang
, Guangbo Hao
, Peng Yan

School of Engineering and Architecture

Shandong University

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

Abstract

Linear optical encoders with a nano-resolution have been widely applied in various precision engineering fields for displacement feedback supporting micro/nano motions regulated by feedback control systems. However such sensing method is sensitive to assembly tolerance in the lateral motion (perpendicular to the primary direction), which limits its applications to single-axis motion systems or very small stroke multi-axis motion systems. In this paper, a large range X-Y parallel flexure-beam based micro-motion system is developed with an enhanced sensing framework employing two linear optical encoders to measure the two-axis large outputs. Meanwhile, both the open-loop and preliminary closed-loop experiments are conducted, demonstrating effectiveness of the proposed design and accurate sensing capability of the sensing framework.

Original language	English
Title of host publication	2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings
Editors	Miao Yu, Zhankun Weng
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	283-287
Number of pages	5
ISBN (Electronic)	9781538662144
DOIs	https://doi.org/10.1109/3M-NANO.2018.8552209
Publication status	Published - 28 Nov 2018
Event	8th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Hangzhou, China Duration: 13 Aug 2018 → 17 Aug 2018

Publication series

Name	2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings

Conference

Conference	8th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018
Country/Territory	China
City	Hangzhou
Period	13/08/18 → 17/08/18

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Keywords

compliant mechanism
Large range micro stage
linear optical encoder

Access to Document

10.1109/3M-NANO.2018.8552209

Cite this

Zhang, Z., Hao, G., & Yan, P. (2018). A Large Range X-Y Parallel Micro-motion System with Optical Encoder Displacement Feedback. In M. Yu, & Z. Weng (Eds.), 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings (pp. 283-287). Article 8552209 (2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/3M-NANO.2018.8552209

Zhang, Zhiming ; Hao, Guangbo ; Yan, Peng. / A Large Range X-Y Parallel Micro-motion System with Optical Encoder Displacement Feedback. 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings. editor / Miao Yu ; Zhankun Weng. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 283-287 (2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings).

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title = "A Large Range X-Y Parallel Micro-motion System with Optical Encoder Displacement Feedback",

abstract = "Linear optical encoders with a nano-resolution have been widely applied in various precision engineering fields for displacement feedback supporting micro/nano motions regulated by feedback control systems. However such sensing method is sensitive to assembly tolerance in the lateral motion (perpendicular to the primary direction), which limits its applications to single-axis motion systems or very small stroke multi-axis motion systems. In this paper, a large range X-Y parallel flexure-beam based micro-motion system is developed with an enhanced sensing framework employing two linear optical encoders to measure the two-axis large outputs. Meanwhile, both the open-loop and preliminary closed-loop experiments are conducted, demonstrating effectiveness of the proposed design and accurate sensing capability of the sensing framework.",

keywords = "compliant mechanism, Large range micro stage, linear optical encoder",

author = "Zhiming Zhang and Guangbo Hao and Peng Yan",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 8th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 ; Conference date: 13-08-2018 Through 17-08-2018",

year = "2018",

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doi = "10.1109/3M-NANO.2018.8552209",

language = "English",

series = "2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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}

Zhang, Z, Hao, G & Yan, P 2018, A Large Range X-Y Parallel Micro-motion System with Optical Encoder Displacement Feedback. in M Yu & Z Weng (eds), 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings., 8552209, 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 283-287, 8th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018, Hangzhou, China, 13/08/18. https://doi.org/10.1109/3M-NANO.2018.8552209

A Large Range X-Y Parallel Micro-motion System with Optical Encoder Displacement Feedback. / Zhang, Zhiming; Hao, Guangbo; Yan, Peng.
2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings. ed. / Miao Yu; Zhankun Weng. Institute of Electrical and Electronics Engineers Inc., 2018. p. 283-287 8552209 (2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

TY - GEN

T1 - A Large Range X-Y Parallel Micro-motion System with Optical Encoder Displacement Feedback

AU - Zhang, Zhiming

AU - Hao, Guangbo

AU - Yan, Peng

PY - 2018/11/28

Y1 - 2018/11/28

N2 - Linear optical encoders with a nano-resolution have been widely applied in various precision engineering fields for displacement feedback supporting micro/nano motions regulated by feedback control systems. However such sensing method is sensitive to assembly tolerance in the lateral motion (perpendicular to the primary direction), which limits its applications to single-axis motion systems or very small stroke multi-axis motion systems. In this paper, a large range X-Y parallel flexure-beam based micro-motion system is developed with an enhanced sensing framework employing two linear optical encoders to measure the two-axis large outputs. Meanwhile, both the open-loop and preliminary closed-loop experiments are conducted, demonstrating effectiveness of the proposed design and accurate sensing capability of the sensing framework.

AB - Linear optical encoders with a nano-resolution have been widely applied in various precision engineering fields for displacement feedback supporting micro/nano motions regulated by feedback control systems. However such sensing method is sensitive to assembly tolerance in the lateral motion (perpendicular to the primary direction), which limits its applications to single-axis motion systems or very small stroke multi-axis motion systems. In this paper, a large range X-Y parallel flexure-beam based micro-motion system is developed with an enhanced sensing framework employing two linear optical encoders to measure the two-axis large outputs. Meanwhile, both the open-loop and preliminary closed-loop experiments are conducted, demonstrating effectiveness of the proposed design and accurate sensing capability of the sensing framework.

KW - compliant mechanism

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KW - linear optical encoder

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A2 - Yu, Miao

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PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 8th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018

Y2 - 13 August 2018 through 17 August 2018

ER -

Zhang Z, Hao G, Yan P. A Large Range X-Y Parallel Micro-motion System with Optical Encoder Displacement Feedback. In Yu M, Weng Z, editors, 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2018. p. 283-287. 8552209. (2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings). doi: 10.1109/3M-NANO.2018.8552209

A Large Range X-Y Parallel Micro-motion System with Optical Encoder Displacement Feedback

Abstract

Publication series

Conference

UN SDGs

Keywords

Access to Document

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