Abstract
We outline a process methodology for the fabrication of light-weighted flexible polyimide based microelectrodes. These microelectrode arrays were designed to enable the investigation of outstanding issues related to the development of a retinal prosthetic device but are also applicable to many other biomedical applications including for example peripheral nerve stimulation. This process could equally well be applied to fabricating ultra-thin flex wiring. The proto-type devices consist of planar electrode arrays and tracking encapsulated between a base, and covering layer of polyimide with a total thickness of 16 μ m. A novel laser assisted method has been employed to liberate the devices non-destructively from the carrier substrate in a planar unstressed format. A review of the ablation process optimisation and cyto-toxicity testing results will be presented.
| Original language | English |
|---|---|
| Pages (from-to) | 296-301 |
| Number of pages | 6 |
| Journal | Sensors and Actuators A: Physical |
| Volume | 132 |
| Issue number | 1 SPEC. ISS. |
| DOIs | |
| Publication status | Published - 8 Nov 2006 |
Keywords
- Laser ablation
- Retinal prosthesis
- Ultra-thin flex