A MEMS silicon-based piezoelectric AC current sensor

Oskar Zbigniew Olszewski; Ruth Houlihan; Rosemary O'Keeffe; Mike O'Neill; Finbarr Waldron; Alan Mathewson; Nathan Jackson

doi:10.1016/j.proeng.2014.11.724

A MEMS silicon-based piezoelectric AC current sensor

Oskar Zbigniew Olszewski
, Ruth Houlihan
, Rosemary O'Keeffe
, Mike O'Neill
, Finbarr Waldron
, Alan Mathewson
, Nathan Jackson

Research output: Contribution to journal › Article › peer-review

Abstract

This paper describes a MEMS silicon-based piezoelectric AC current sensor that can be used to monitor the energy usage in an electric infrastructure. The overall device concept relies on a silicon cantilever that incorporates a permanent magnet in its mass and that is covered by a thin layer of piezoelectric material. When brought close to an AC current carrying wire, the magnet couples to the AC magnetic field from the conductor, causing the device to vibrate at the frequency of the AC signal. In contrast to previous work, the device in this paper operates at the resonance frequency for improved device response.

Original language	English
Pages (from-to)	1457-1460
Number of pages	4
Journal	Procedia Engineering
Volume	87
DOIs	https://doi.org/10.1016/j.proeng.2014.11.724
Publication status	Published - 2014
Event	28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy Duration: 7 Sep 2014 → 10 Sep 2014

Keywords

Aluminium nitride
Current sensor
Magnetic
MEMS
Permanent magnet
Piezoelectric
Silicon

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10.1016/j.proeng.2014.11.724

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title = "A MEMS silicon-based piezoelectric AC current sensor",

abstract = "This paper describes a MEMS silicon-based piezoelectric AC current sensor that can be used to monitor the energy usage in an electric infrastructure. The overall device concept relies on a silicon cantilever that incorporates a permanent magnet in its mass and that is covered by a thin layer of piezoelectric material. When brought close to an AC current carrying wire, the magnet couples to the AC magnetic field from the conductor, causing the device to vibrate at the frequency of the AC signal. In contrast to previous work, the device in this paper operates at the resonance frequency for improved device response.",

keywords = "Aluminium nitride, Current sensor, Magnetic, MEMS, Permanent magnet, Piezoelectric, Silicon",

author = "Olszewski, \{Oskar Zbigniew\} and Ruth Houlihan and Rosemary O'Keeffe and Mike O'Neill and Finbarr Waldron and Alan Mathewson and Nathan Jackson",

note = "Publisher Copyright: {\textcopyright} 2014 The Authors. Published by Elsevier Ltd.; 28th European Conference on Solid-State Transducers, EUROSENSORS 2014 ; Conference date: 07-09-2014 Through 10-09-2014",

year = "2014",

doi = "10.1016/j.proeng.2014.11.724",

language = "English",

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journal = "Procedia Engineering",

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T1 - A MEMS silicon-based piezoelectric AC current sensor

AU - Olszewski, Oskar Zbigniew

AU - Houlihan, Ruth

AU - O'Keeffe, Rosemary

AU - O'Neill, Mike

AU - Waldron, Finbarr

AU - Mathewson, Alan

AU - Jackson, Nathan

PY - 2014

Y1 - 2014

N2 - This paper describes a MEMS silicon-based piezoelectric AC current sensor that can be used to monitor the energy usage in an electric infrastructure. The overall device concept relies on a silicon cantilever that incorporates a permanent magnet in its mass and that is covered by a thin layer of piezoelectric material. When brought close to an AC current carrying wire, the magnet couples to the AC magnetic field from the conductor, causing the device to vibrate at the frequency of the AC signal. In contrast to previous work, the device in this paper operates at the resonance frequency for improved device response.

AB - This paper describes a MEMS silicon-based piezoelectric AC current sensor that can be used to monitor the energy usage in an electric infrastructure. The overall device concept relies on a silicon cantilever that incorporates a permanent magnet in its mass and that is covered by a thin layer of piezoelectric material. When brought close to an AC current carrying wire, the magnet couples to the AC magnetic field from the conductor, causing the device to vibrate at the frequency of the AC signal. In contrast to previous work, the device in this paper operates at the resonance frequency for improved device response.

KW - Aluminium nitride

KW - Current sensor

KW - Magnetic

KW - MEMS

KW - Permanent magnet

KW - Piezoelectric

KW - Silicon

UR - https://www.scopus.com/pages/publications/84923323612

U2 - 10.1016/j.proeng.2014.11.724

DO - 10.1016/j.proeng.2014.11.724

M3 - Article

AN - SCOPUS:84923323612

SN - 1877-7058

VL - 87

SP - 1457

EP - 1460

JO - Procedia Engineering

JF - Procedia Engineering

T2 - 28th European Conference on Solid-State Transducers, EUROSENSORS 2014

Y2 - 7 September 2014 through 10 September 2014

ER -

A MEMS silicon-based piezoelectric AC current sensor

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Keywords

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