A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits

Pierre Edinger; Alain Yuji Takabayashi; Cleitus Antony; Peter Verheyen; Umar Khan; Wim Bogaerts; Niels Quack; Kristinn B. Gylfason

doi:10.1364/IPRSN.2023.ITu1A.2

A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits

Pierre Edinger
, Alain Yuji Takabayashi
, Cleitus Antony
, Peter Verheyen
, Umar Khan
, Wim Bogaerts
, Niels Quack
, Kristinn B. Gylfason

Research output: Contribution to conference › Paper › peer-review

Abstract

Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry platform.

Original language	English
DOIs	https://doi.org/10.1364/IPRSN.2023.ITu1A.2
Publication status	Published - 2023
Externally published	Yes
Event	2023 Integrated Photonics Research, Silicon and Nanophotonics, IPR 2023 in Advanced Photonics Congress - Part of Advanced Photonics Congress 2023 - Busan, Korea, Republic of Duration: 9 Jul 2023 → 13 Jul 2023

Conference

Conference	2023 Integrated Photonics Research, Silicon and Nanophotonics, IPR 2023 in Advanced Photonics Congress - Part of Advanced Photonics Congress 2023
Country/Territory	Korea, Republic of
City	Busan
Period	9/07/23 → 13/07/23

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10.1364/IPRSN.2023.ITu1A.2

Cite this

Edinger, P., Takabayashi, A. Y., Antony, C., Verheyen, P., Khan, U., Bogaerts, W., Quack, N., & Gylfason, K. B. (2023). A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits. Paper presented at 2023 Integrated Photonics Research, Silicon and Nanophotonics, IPR 2023 in Advanced Photonics Congress - Part of Advanced Photonics Congress 2023, Busan, Korea, Republic of. https://doi.org/10.1364/IPRSN.2023.ITu1A.2

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title = "A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits",

abstract = "Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry platform.",

author = "Pierre Edinger and Takabayashi, \{Alain Yuji\} and Cleitus Antony and Peter Verheyen and Umar Khan and Wim Bogaerts and Niels Quack and Gylfason, \{Kristinn B.\}",

note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2023 {\textcopyright} 2023 The Author(s).; 2023 Integrated Photonics Research, Silicon and Nanophotonics, IPR 2023 in Advanced Photonics Congress - Part of Advanced Photonics Congress 2023 ; Conference date: 09-07-2023 Through 13-07-2023",

year = "2023",

doi = "10.1364/IPRSN.2023.ITu1A.2",

language = "English",

}

Edinger, P, Takabayashi, AY, Antony, C, Verheyen, P, Khan, U, Bogaerts, W, Quack, N & Gylfason, KB 2023, 'A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits', Paper presented at 2023 Integrated Photonics Research, Silicon and Nanophotonics, IPR 2023 in Advanced Photonics Congress - Part of Advanced Photonics Congress 2023, Busan, Korea, Republic of, 9/07/23 - 13/07/23. https://doi.org/10.1364/IPRSN.2023.ITu1A.2

A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits. / Edinger, Pierre; Takabayashi, Alain Yuji; Antony, Cleitus et al.
2023. Paper presented at 2023 Integrated Photonics Research, Silicon and Nanophotonics, IPR 2023 in Advanced Photonics Congress - Part of Advanced Photonics Congress 2023, Busan, Korea, Republic of.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits

AU - Edinger, Pierre

AU - Takabayashi, Alain Yuji

AU - Antony, Cleitus

AU - Verheyen, Peter

AU - Khan, Umar

AU - Bogaerts, Wim

AU - Quack, Niels

AU - Gylfason, Kristinn B.

PY - 2023

Y1 - 2023

N2 - Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry platform.

AB - Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry platform.

UR - https://www.scopus.com/pages/publications/85192363838

U2 - 10.1364/IPRSN.2023.ITu1A.2

DO - 10.1364/IPRSN.2023.ITu1A.2

M3 - Paper

AN - SCOPUS:85192363838

T2 - 2023 Integrated Photonics Research, Silicon and Nanophotonics, IPR 2023 in Advanced Photonics Congress - Part of Advanced Photonics Congress 2023

Y2 - 9 July 2023 through 13 July 2023

ER -

Edinger P, Takabayashi AY, Antony C, Verheyen P, Khan U, Bogaerts W et al.. A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits. 2023. Paper presented at 2023 Integrated Photonics Research, Silicon and Nanophotonics, IPR 2023 in Advanced Photonics Congress - Part of Advanced Photonics Congress 2023, Busan, Korea, Republic of. doi: 10.1364/IPRSN.2023.ITu1A.2

A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits

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