A Silicon-based MEMS Vibrating Mesh Nebulizer for Inhaled Drug Delivery

Oskar Z. Olszewski; Ronan Macloughlin; Alan Blake; Mike O'Neill; Alan Mathewson; Nathan Jackson

doi:10.1016/j.proeng.2016.11.451

A Silicon-based MEMS Vibrating Mesh Nebulizer for Inhaled Drug Delivery

Oskar Z. Olszewski
, Ronan Macloughlin
, Alan Blake
, Mike O'Neill
, Alan Mathewson
, Nathan Jackson

Research output: Contribution to journal › Article › peer-review

Abstract

This paper presents a silicon-based MEMS vibrating mesh nebulizer capable of producing micro droplets for inhaled drug delivery. The device concept, design, fabrication, and measurements are presented. The core element of the nebulizer (vibrating mesh) was fabricated using silicon process and consists of 1000 tapered micro-sized apertures. During operation the mesh vibrates at high frequency with the bending profile corresponding to the 02 resonance mode. The droplet diameter measured at the device output is 3.75 μm and a typical output rate is 0.45 ml / min.

Original language	English
Pages (from-to)	1521-1524
Number of pages	4
Journal	Procedia Engineering
Volume	168
DOIs	https://doi.org/10.1016/j.proeng.2016.11.451
Publication status	Published - 2016
Event	30th Eurosensors Conference, Eurosensors 2016 - Budapest, Hungary Duration: 4 Sep 2016 → 7 Sep 2016

Keywords

aerosol
liquid atomization
MEMS
Nebulizer
piezoelectric
silicon

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10.1016/j.proeng.2016.11.451

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title = "A Silicon-based MEMS Vibrating Mesh Nebulizer for Inhaled Drug Delivery",

abstract = "This paper presents a silicon-based MEMS vibrating mesh nebulizer capable of producing micro droplets for inhaled drug delivery. The device concept, design, fabrication, and measurements are presented. The core element of the nebulizer (vibrating mesh) was fabricated using silicon process and consists of 1000 tapered micro-sized apertures. During operation the mesh vibrates at high frequency with the bending profile corresponding to the 02 resonance mode. The droplet diameter measured at the device output is 3.75 μm and a typical output rate is 0.45 ml / min.",

keywords = "aerosol, liquid atomization, MEMS, Nebulizer, piezoelectric, silicon",

author = "Olszewski, \{Oskar Z.\} and Ronan Macloughlin and Alan Blake and Mike O'Neill and Alan Mathewson and Nathan Jackson",

note = "Publisher Copyright: {\textcopyright} 2016 The Authors.; 30th Eurosensors Conference, Eurosensors 2016 ; Conference date: 04-09-2016 Through 07-09-2016",

year = "2016",

doi = "10.1016/j.proeng.2016.11.451",

language = "English",

volume = "168",

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journal = "Procedia Engineering",

issn = "1877-7058",

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T1 - A Silicon-based MEMS Vibrating Mesh Nebulizer for Inhaled Drug Delivery

AU - Olszewski, Oskar Z.

AU - Macloughlin, Ronan

AU - Blake, Alan

AU - O'Neill, Mike

AU - Mathewson, Alan

AU - Jackson, Nathan

PY - 2016

Y1 - 2016

N2 - This paper presents a silicon-based MEMS vibrating mesh nebulizer capable of producing micro droplets for inhaled drug delivery. The device concept, design, fabrication, and measurements are presented. The core element of the nebulizer (vibrating mesh) was fabricated using silicon process and consists of 1000 tapered micro-sized apertures. During operation the mesh vibrates at high frequency with the bending profile corresponding to the 02 resonance mode. The droplet diameter measured at the device output is 3.75 μm and a typical output rate is 0.45 ml / min.

AB - This paper presents a silicon-based MEMS vibrating mesh nebulizer capable of producing micro droplets for inhaled drug delivery. The device concept, design, fabrication, and measurements are presented. The core element of the nebulizer (vibrating mesh) was fabricated using silicon process and consists of 1000 tapered micro-sized apertures. During operation the mesh vibrates at high frequency with the bending profile corresponding to the 02 resonance mode. The droplet diameter measured at the device output is 3.75 μm and a typical output rate is 0.45 ml / min.

KW - aerosol

KW - liquid atomization

KW - MEMS

KW - Nebulizer

KW - piezoelectric

KW - silicon

UR - https://www.scopus.com/pages/publications/85009968809

U2 - 10.1016/j.proeng.2016.11.451

DO - 10.1016/j.proeng.2016.11.451

M3 - Article

AN - SCOPUS:85009968809

SN - 1877-7058

VL - 168

SP - 1521

EP - 1524

JO - Procedia Engineering

JF - Procedia Engineering

T2 - 30th Eurosensors Conference, Eurosensors 2016

Y2 - 4 September 2016 through 7 September 2016

ER -

A Silicon-based MEMS Vibrating Mesh Nebulizer for Inhaled Drug Delivery

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