A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches

C. Ryan; Z. Olszewski; R. Houlihan; C. O'Mahony; R. Duane

doi:10.1063/1.4865584

A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches

C. Ryan
, Z. Olszewski
, R. Houlihan
, C. O'Mahony
, R. Duane

University College Cork

Research output: Contribution to journal › Article › peer-review

Abstract

A bipolar hold-down voltage was used to study mechanical degradation in radio-frequency microelectromechanical capacitive shunt switches. The bipolar signal was used to prevent the occurrence of dielectric charging and to isolate mechanical effects. The characteristics of material stress relaxation and recovery were monitored by recording the change of the pull-in voltage of a device. The creep effect in movable components was saturated by repeated actuation to the pulled-in position, while comparison with a theoretical model confirmed the presence of linear viscoelasticity in the devices.

Original language	English
Article number	061908
Journal	Applied Physics Letters
Volume	104
Issue number	6
DOIs	https://doi.org/10.1063/1.4865584
Publication status	Published - 2 Oct 2014

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@article{5204aad1712d43fba2ab3fdd8c8bac08,

title = "A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches",

abstract = "A bipolar hold-down voltage was used to study mechanical degradation in radio-frequency microelectromechanical capacitive shunt switches. The bipolar signal was used to prevent the occurrence of dielectric charging and to isolate mechanical effects. The characteristics of material stress relaxation and recovery were monitored by recording the change of the pull-in voltage of a device. The creep effect in movable components was saturated by repeated actuation to the pulled-in position, while comparison with a theoretical model confirmed the presence of linear viscoelasticity in the devices.",

author = "C. Ryan and Z. Olszewski and R. Houlihan and C. O'Mahony and R. Duane",

note = "Publisher Copyright: {\textcopyright} 2014 AIP Publishing LLC.",

year = "2014",

month = oct,

day = "2",

doi = "10.1063/1.4865584",

language = "English",

volume = "104",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "6",

}

TY - JOUR

T1 - A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches

AU - Ryan, C.

AU - Olszewski, Z.

AU - Houlihan, R.

AU - O'Mahony, C.

AU - Duane, R.

PY - 2014/10/2

Y1 - 2014/10/2

N2 - A bipolar hold-down voltage was used to study mechanical degradation in radio-frequency microelectromechanical capacitive shunt switches. The bipolar signal was used to prevent the occurrence of dielectric charging and to isolate mechanical effects. The characteristics of material stress relaxation and recovery were monitored by recording the change of the pull-in voltage of a device. The creep effect in movable components was saturated by repeated actuation to the pulled-in position, while comparison with a theoretical model confirmed the presence of linear viscoelasticity in the devices.

AB - A bipolar hold-down voltage was used to study mechanical degradation in radio-frequency microelectromechanical capacitive shunt switches. The bipolar signal was used to prevent the occurrence of dielectric charging and to isolate mechanical effects. The characteristics of material stress relaxation and recovery were monitored by recording the change of the pull-in voltage of a device. The creep effect in movable components was saturated by repeated actuation to the pulled-in position, while comparison with a theoretical model confirmed the presence of linear viscoelasticity in the devices.

UR - https://www.scopus.com/pages/publications/84905168388

U2 - 10.1063/1.4865584

DO - 10.1063/1.4865584

M3 - Article

AN - SCOPUS:84905168388

SN - 0003-6951

VL - 104

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 6

M1 - 061908

ER -

A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches

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