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A TCAD study on the effect of process parameters on silicon optical phase shifter performance
Darpan Mishra
, Ramesh Kumar Sonkar
Tyndall
Tyndall Photonics
Indian Institute of Technology Guwahati
Research output
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peer-review
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Engineering
Optical Phase
100%
Process Parameter
100%
Phase Shifters
100%
Metrics
16%
Process Flow
16%
Limiting Factor
16%
Phase Shift
16%
Crystal Structure
16%
Dopants
16%
Channelling
16%
Annealing Time
16%
Annealing Temperature
16%
Rotation Angle
16%
Phase Modulator
16%
Carrier Absorption
16%
Process Simulation
16%
Computer Simulation
16%
Chemistry
Silicon
100%
Crystal Structure
50%
Doping Material
50%
Crystal System
50%
Computer Simulation
50%
Amorphization
50%
Ion Channeling
50%
Structure of the Solid
50%
Material Science
Silicon
100%
Crystal Structure
50%
Doping (Additives)
50%
Amorphization
50%
Process Simulation
50%
Annealing Temperature
50%
Annealing Time
50%
Physics
Crystal Structure
100%
Monte Carlo
100%
Numerical Simulation
100%