| Original language | English |
|---|---|
| Publication status | Published - Jun 2018 |
| Externally published | Yes |
| Event | WODIM 2018 - 20th Workshop on Dielectrics in Microelectronics, 2018 - , Germany Duration: 1 Jun 2018 → … |
Conference
| Conference | WODIM 2018 - 20th Workshop on Dielectrics in Microelectronics, 2018 |
|---|---|
| Country/Territory | Germany |
| Period | 1/06/18 → … |