Acoustic Phonons in Ultrathin Free-Standing Silicon Membranes

Clivia M.Sotomayor Torres; Francesc Alzina; Andrey Shchepetov; Emigdio Chavez-Angel; John Cuffe; Bartlomiej Graczykowski; Mika Prunnila; Juan Sebastian Reparaz; Jouni Ahopelto

doi:10.1002/9783527691005.ch12

Acoustic Phonons in Ultrathin Free-Standing Silicon Membranes

Clivia M.Sotomayor Torres
, Francesc Alzina
, Andrey Shchepetov
, Emigdio Chavez-Angel
, John Cuffe
, Bartlomiej Graczykowski
, Mika Prunnila
, Juan Sebastian Reparaz
, Jouni Ahopelto

School of Physics

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

Abstract

This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.

Original language	English
Title of host publication	Silicon Nanomembranes
Subtitle of host publication	Fundamental Science and Applications
Publisher	Wiley-VCH Verlag
Pages	305-326
Number of pages	22
ISBN (Electronic)	9783527691005
ISBN (Print)	9783527338313
DOIs	https://doi.org/10.1002/9783527691005.ch12
Publication status	Published - 20 Jun 2016

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Acoustic phonons
Confined phonons
Free-standing membranes
Inelastic light scattering
Laser Raman thermometry
Nanofabrication
Phonon dispersion relations
Phononic crystals
Thermal conductivity
Ultrathin silicon-on-insulator

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10.1002/9783527691005.ch12

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abstract = "This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.",

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AU - Torres, Clivia M.Sotomayor

AU - Alzina, Francesc

AU - Shchepetov, Andrey

AU - Chavez-Angel, Emigdio

AU - Cuffe, John

AU - Graczykowski, Bartlomiej

AU - Prunnila, Mika

AU - Reparaz, Juan Sebastian

AU - Ahopelto, Jouni

PY - 2016/6/20

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N2 - This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.

AB - This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.

KW - Acoustic phonons

KW - Confined phonons

KW - Free-standing membranes

KW - Inelastic light scattering

KW - Laser Raman thermometry

KW - Nanofabrication

KW - Phonon dispersion relations

KW - Phononic crystals

KW - Thermal conductivity

KW - Ultrathin silicon-on-insulator

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M3 - Chapter

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SN - 9783527338313

SP - 305

EP - 326

BT - Silicon Nanomembranes

PB - Wiley-VCH Verlag

ER -

Acoustic Phonons in Ultrathin Free-Standing Silicon Membranes

Abstract

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Keywords

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