Advanced FinFET devices for sub-32nm technology nodes: Characteristics and integration challenges
- A. Veloso
- , N. Collaert
- , A. De Keersgieter
- , L. Witters
- , R. Rooyackers
- , M. J.H. Van Dal
- , R. Duffy
- , B. J. Pawlak
- , R. J.P. Lander
- , T. Hoffmann
- , S. Biesemans
- , M. Jurczak
Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review