@inbook{c041e59ba8e3494a982190c78046afbf,
title = "Advanced semiconductor devices for future CMOS technologies",
abstract = "Device scaling for higher performance and lower power consumption requires the introduction of advanced process modules, new materials new device architectures and finally even the use of alternative device operation principles compared to the standard MOS transistor. Several of these advanced devices will be discussed in view of their scalability and their potential for coping with the ITRS roadmap. Key performance parameters will be investigated.",
author = "C. Claeys and D. Chiappe and N. Collaert and J. Mitard and I. Radu and R. Rooyackers and E. Simoen and A. Vandooren and A. Veloso and N. Waldron and L. Witters and A. Thean",
note = "Publisher Copyright: {\textcopyright} The Electrochemical Society.; Symposium on Advanced CMOS-Compatible Semiconductor Devices 17 - 227th ECS Meeting ; Conference date: 24-05-2015 Through 28-05-2015",
year = "2015",
doi = "10.1149/06605.0049ecst",
language = "English",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "5",
pages = "49--60",
editor = "Y. Omura and Martino, \{J. A.\} and Raskin, \{J. P.\} and S. Selberherr and H. Ishii and F. Gamiz and Nguyen, \{B. Y.\}",
booktitle = "Advanced CMOS-Compatible Semiconductor Devices 17",
address = "United States",
edition = "5",
}