Advanced test structure design for dielectric characterisation of novel high-K materials

Engineering

• Dielectrics 100%
• Test Structure 100%
• Thin Films 50%
• Waveguide 50%
• Thin Film Characterization 50%
• High Dielectric Constant 50%
• Metal-Insulator-Metal 50%
• Technology Integration 50%
• Decoupling Capacitor 50%
• Film Layer 50%

Material Science

• Dielectric Material 100%
• Capacitor 100%
• Thin Films 33%
• Waveguide 33%
• Permittivity 33%
• Thin Film Characterization 33%