TY - JOUR
T1 - Analysis of conductive filament density in resistive random access memories: a 3D kinetic Monte Carlo approach
AU - Aldana, Samuel
AU - Garcia Fernandez, Pedro
AU - Romero-Zaliz, Rocio
AU - Jiménez-Molinos, Francisco
AU - Gómez-Campos, Francisco
AU - Roldán Aranda, Juan Bautista
PY - 2018/11/1
Y1 - 2018/11/1
N2 - An in-depth physical study of conductive filaments (CFs) density in Ni/HfO 2/Si-n+ unipolar resistive random access memories (RRAMs) has been performed. To do so, the authors have employed both experimental measurements and simulations by means of a 3D kinetic Monte Carlo (kMC) tool. The kMC simulator accounts for redox reactions and ion migration considering the three dimensional (3D) temperature and electric potential distributions within the device dielectric at each simulation time step. The formation and destruction of conductive filaments are described; in particular, the CF density is calculated making use of a new methodology proposed here. The CF ohmic resistance can be linked to the CF density. Finally, the 2D and 3D percolation paths within the conductive filaments are analyzed to characterize the low resistance state of the RRAM under study.
AB - An in-depth physical study of conductive filaments (CFs) density in Ni/HfO 2/Si-n+ unipolar resistive random access memories (RRAMs) has been performed. To do so, the authors have employed both experimental measurements and simulations by means of a 3D kinetic Monte Carlo (kMC) tool. The kMC simulator accounts for redox reactions and ion migration considering the three dimensional (3D) temperature and electric potential distributions within the device dielectric at each simulation time step. The formation and destruction of conductive filaments are described; in particular, the CF density is calculated making use of a new methodology proposed here. The CF ohmic resistance can be linked to the CF density. Finally, the 2D and 3D percolation paths within the conductive filaments are analyzed to characterize the low resistance state of the RRAM under study.
UR - http://dx.doi.org/10.1116/1.5049213
U2 - 10.1116/1.5049213
DO - 10.1116/1.5049213
M3 - Article
SN - 2166-2746
VL - 36
JO - Journal of Vacuum Science and Technology B
JF - Journal of Vacuum Science and Technology B
IS - 6
ER -