Abstract
The electrical properties of metal-oxide-semiconductor capacitors incorporating atomic layer deposited Al2O3 on n-type and p-type In0.53Ga0.47As were investigated. A clear minority carrier response was observed for both n-type and p-type Au/Ni/Al 2O3/In0.53Ga0.47As devices following an optimized ammonium sulfide (NH4)2S treatment. Capacitance-voltage and conductance-voltage measurements performed at varying temperatures allowed an Arrhenius extraction of activation energies for the minority carrier response, indicating a transition from a generation- recombination regime to a diffusion controlled response.
| Original language | English |
|---|---|
| Article number | 212901 |
| Journal | Applied Physics Letters |
| Volume | 99 |
| Issue number | 21 |
| DOIs | |
| Publication status | Published - 21 Nov 2011 |
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