Analysis of the minority carrier response of n-type and p-type Au/Ni/Al2O3/In0.53Ga0.47As/InP capacitors following an optimized (NH4)2S treatment

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Abstract

The electrical properties of metal-oxide-semiconductor capacitors incorporating atomic layer deposited Al2O3 on n-type and p-type In0.53Ga0.47As were investigated. A clear minority carrier response was observed for both n-type and p-type Au/Ni/Al 2O3/In0.53Ga0.47As devices following an optimized ammonium sulfide (NH4)2S treatment. Capacitance-voltage and conductance-voltage measurements performed at varying temperatures allowed an Arrhenius extraction of activation energies for the minority carrier response, indicating a transition from a generation- recombination regime to a diffusion controlled response.

Original languageEnglish
Article number212901
JournalApplied Physics Letters
Volume99
Issue number21
DOIs
Publication statusPublished - 21 Nov 2011

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