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Application of an Sb Surfactant in InGaAs Nano-ridge Engineering on 300 mm Silicon Substrates

  • Bernardette Kunert
  • , Reynald Alcotte
  • , Yves Mols
  • , Marina Baryshnikova
  • , Niamh Waldron
  • , Nadine Collaert
  • , Robert Langer
  • Interuniversitair Micro-Elektronica Centrum

Research output: Contribution to journal › Article › peer-review

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