Skip to main navigation Skip to search Skip to main content

Arsenic Junction Thermal Stability and High-Dose Boron-Pocket Activation During SPER in nMOS Transistors

  • S. Severi
  • , K. De Meyer
  • , B. J. Pawlak
  • , R. Duffy
  • , E. Augendre
  • , K. Henson
  • , R. Lindsay
  • Interuniversitair Micro-Elektronica Centrum
  • KU Leuven
  • NXP Semiconductors

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Arsenic Junction Thermal Stability and High-Dose Boron-Pocket Activation During SPER in nMOS Transistors'. Together they form a unique fingerprint.
Sort by

Engineering

Material Science

Physics