Assessing the correlation between location and size of catastrophic breakdown events in high-k mim capacitors

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	IEEE Transactions on Device and Materials Reliability
DOIs	https://doi.org/10.1109/TDMR.2019.2917138
Publication status	Published - 2019

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title = "Assessing the correlation between location and size of catastrophic breakdown events in high-k mim capacitors",

author = "Ailbe O'Manachain",

year = "2019",

doi = "10.1109/TDMR.2019.2917138",

language = "Undefined/Unknown",

journal = "IEEE Transactions on Device and Materials Reliability",

issn = "1530-4388",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - JOUR

T1 - Assessing the correlation between location and size of catastrophic breakdown events in high-k mim capacitors

AU - O'Manachain, Ailbe

PY - 2019

Y1 - 2019

U2 - 10.1109/TDMR.2019.2917138

DO - 10.1109/TDMR.2019.2917138

M3 - Article

SN - 1530-4388

JO - IEEE Transactions on Device and Materials Reliability

JF - IEEE Transactions on Device and Materials Reliability

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