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Atomic and molecular layer deposition of Nd- and Eu-based oxide and hybrid thin films: Computationally guided precursor selection

  • Florian Preischel
  • , Amr Ghazy
  • , Merve Seren
  • , Jorit Obenluneschloss
  • , Rita Mullins
  • , Detlef Rogalla
  • , Thomas Gemming
  • , Michael Nolan
  • , Jorg Debus
  • , Maarit Karppinen
  • , Anjana Devi

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