Atomic layer deposition for the fabrication of 3D photonic crystals structures: Growth of Al2O3 and VO2 photonic crystal systems

  • I. M. Povey
  • , M. Bardosova
  • , F. Chalvet
  • , M. E. Pemble
  • , H. M. Yates

Research output: Contribution to journal › Article › peer-review

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