@inproceedings{c361c9e0a8ba42699a0892db2df8e072,
title = "Atomic layer deposition of HfO2 on III-V semiconductors - An interfacial chemistry perspective",
author = "W. Cabrera and H. Dong and B. Brennan and E. O'Connor and P. Carolan and R. Galatage and S. Monaghan and I. Povey and P.K. Hurley and C.L. Hinkle and Y. Chabal and R.M. Wallace",
year = "2013",
language = "Undefined/Unknown",
booktitle = "Atomic layer deposition of HfO2 on III-V semiconductors - An interfacial chemistry perspective",
}