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Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100 °c through Control of Plasma Chemistry

  • Miika Mattinen
  • , Farzan Gity
  • , Emma Coleman
  • , Joris F.A. Vonk
  • , Marcel A. Verheijen
  • , Ray Duffy
  • , Wilhelmus M.M. Kessels
  • , Ageeth A. Bol
  • Eindhoven University of Technology
  • Eurofins Materials Science
  • University of Michigan, Ann Arbor

Research output: Contribution to journal › Article › peer-review

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