Atomic Layer Deposition of Metal and Metal Oxide Nanostructures

Ian Povey

doi:10.1149/ma2008-02/24/1910

Atomic Layer Deposition of Metal and Metal Oxide Nanostructures

Ian Povey

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Meeting Abstracts
DOIs	https://doi.org/10.1149/ma2008-02/24/1910
Publication status	Published - 2008

Keywords

Metal
Atomic layer deposition
Materials science
Layer (electronics)
Oxide
Deposition (geology)
Nanostructure
Nanotechnology
Chemical engineering
Inorganic chemistry
Metallurgy
Chemistry
Geology
Engineering
Paleontology
Sediment

Access to Document

10.1149/ma2008-02/24/1910

https://openalex.org/W2752513867Licence: CC BY-NC-ND

Cite this

@article{0d78894840d94ee4add3dac2f1b2f20c,

title = "Atomic Layer Deposition of Metal and Metal Oxide Nanostructures",

keywords = "Metal, Atomic layer deposition, Materials science, Layer (electronics), Oxide, Deposition (geology), Nanostructure, Nanotechnology, Chemical engineering, Inorganic chemistry, Metallurgy, Chemistry, Geology, Engineering, Paleontology, Sediment",

author = "Ian Povey",

year = "2008",

doi = "10.1149/ma2008-02/24/1910",

language = "English",

journal = "Meeting Abstracts",

issn = "1091-8213",

}

TY - JOUR

T1 - Atomic Layer Deposition of Metal and Metal Oxide Nanostructures

AU - Povey, Ian

PY - 2008

Y1 - 2008

KW - Metal

KW - Atomic layer deposition

KW - Materials science

KW - Layer (electronics)

KW - Oxide

KW - Deposition (geology)

KW - Nanostructure

KW - Nanotechnology

KW - Chemical engineering

KW - Inorganic chemistry

KW - Metallurgy

KW - Chemistry

KW - Geology

KW - Engineering

KW - Paleontology

KW - Sediment

U2 - 10.1149/ma2008-02/24/1910

DO - 10.1149/ma2008-02/24/1910

M3 - Article

SN - 1091-8213

JO - Meeting Abstracts

JF - Meeting Abstracts

ER -