| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | AVS-ALD & Baltic ALD 2012 |
| Publication status | Published - 18 Jun 2012 |
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Atomic layer deposition of metal silicates as scalable high-k metal-insulator-metal capacitors with low leakage, high breakdown fields and improved voltage linearity
Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding