Benzoylpivaloylmethanide Precursors for the Chemical Beam Epitaxy of Oxide Thin Films. 1. Synthesis, Characterization, and Use of Yttrium Benzoylpivaloylmethanide

E. Fritsch; E. Mächler; F. Arrouy; O. Orama; H. Berke; I. Povey; P. R. Willmott; J. P. Locquet

doi:10.1021/cm9602510

Benzoylpivaloylmethanide Precursors for the Chemical Beam Epitaxy of Oxide Thin Films. 1. Synthesis, Characterization, and Use of Yttrium Benzoylpivaloylmethanide

E. Fritsch
, E. Mächler
, F. Arrouy
, O. Orama
, H. Berke
, I. Povey
, P. R. Willmott
, J. P. Locquet

Research output: Contribution to journal › Article › peer-review

Abstract

The new complex yttrium benzoylpivaloylmethanide and its acetonitrile adduct have been characterized by IR, NMR, mass spectroscopy, X-ray structure analysis, and thermogravimetric/differential thermal analysis. In situ flux measurements and mass spectroscopic studies have been performed to test the suitability of this compound as a precursor for the deposition of complex oxide thin films under molecular beam conditions. Finally it has been used to deposit epitaxial Y₂O₃ (001) thin films on SrTiO₃ (001) substrates.

Original language	English
Pages (from-to)	127-134
Number of pages	8
Journal	Chemistry of Materials
Volume	9
Issue number	1
DOIs	https://doi.org/10.1021/cm9602510
Publication status	Published - Jan 1997
Externally published	Yes

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title = "Benzoylpivaloylmethanide Precursors for the Chemical Beam Epitaxy of Oxide Thin Films. 1. Synthesis, Characterization, and Use of Yttrium Benzoylpivaloylmethanide",

abstract = "The new complex yttrium benzoylpivaloylmethanide and its acetonitrile adduct have been characterized by IR, NMR, mass spectroscopy, X-ray structure analysis, and thermogravimetric/differential thermal analysis. In situ flux measurements and mass spectroscopic studies have been performed to test the suitability of this compound as a precursor for the deposition of complex oxide thin films under molecular beam conditions. Finally it has been used to deposit epitaxial Y2O3 (001) thin films on SrTiO3 (001) substrates.",

author = "E. Fritsch and E. M{\"a}chler and F. Arrouy and O. Orama and H. Berke and I. Povey and Willmott, \{P. R.\} and Locquet, \{J. P.\}",

year = "1997",

month = jan,

doi = "10.1021/cm9602510",

language = "English",

volume = "9",

pages = "127--134",

journal = "Chemistry of Materials",

issn = "0897-4756",

publisher = "American Chemical Society",

number = "1",

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T1 - Benzoylpivaloylmethanide Precursors for the Chemical Beam Epitaxy of Oxide Thin Films. 1. Synthesis, Characterization, and Use of Yttrium Benzoylpivaloylmethanide

AU - Fritsch, E.

AU - Mächler, E.

AU - Arrouy, F.

AU - Orama, O.

AU - Berke, H.

AU - Povey, I.

AU - Willmott, P. R.

AU - Locquet, J. P.

PY - 1997/1

Y1 - 1997/1

N2 - The new complex yttrium benzoylpivaloylmethanide and its acetonitrile adduct have been characterized by IR, NMR, mass spectroscopy, X-ray structure analysis, and thermogravimetric/differential thermal analysis. In situ flux measurements and mass spectroscopic studies have been performed to test the suitability of this compound as a precursor for the deposition of complex oxide thin films under molecular beam conditions. Finally it has been used to deposit epitaxial Y2O3 (001) thin films on SrTiO3 (001) substrates.

AB - The new complex yttrium benzoylpivaloylmethanide and its acetonitrile adduct have been characterized by IR, NMR, mass spectroscopy, X-ray structure analysis, and thermogravimetric/differential thermal analysis. In situ flux measurements and mass spectroscopic studies have been performed to test the suitability of this compound as a precursor for the deposition of complex oxide thin films under molecular beam conditions. Finally it has been used to deposit epitaxial Y2O3 (001) thin films on SrTiO3 (001) substrates.

UR - https://www.scopus.com/pages/publications/0041025051

U2 - 10.1021/cm9602510

DO - 10.1021/cm9602510

M3 - Article

AN - SCOPUS:0041025051

SN - 0897-4756

VL - 9

SP - 127

EP - 134

JO - Chemistry of Materials

JF - Chemistry of Materials

IS - 1

ER -

Benzoylpivaloylmethanide Precursors for the Chemical Beam Epitaxy of Oxide Thin Films. 1. Synthesis, Characterization, and Use of Yttrium Benzoylpivaloylmethanide

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