Boron redistribution in pre-amorphized Si during thermal annealing
- Lourdes Pelaz
- , Maria Aboy
- , Ray Duffy
- , Vincent Venezia
- , Luis A. Marqués
- , Pedro López
- , Iván Santos
- , Jesús Hernández
- , Luis A. Bailón
- , Juan Barbolla
- University of Valladolid
- Koninklijke Philips N.V.
Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review