Boron uphill diffusion during ultrashallow junction formation

  • R. Duffy
  • , V. C. Venezia
  • , A. Heringa
  • , T. W.T. Hüsken
  • , M. J.P. Hopstaken
  • , N. E.B. Cowern
  • , P. B. Griffin
  • , C. C. Wang

Research output: Contribution to journal › Article › peer-review

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Biochemistry, Genetics and Molecular Biology