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Capacitive microelectromechanical switch for space applications

  • Cormac Ryan
  • , Oskar Z. Olszewski
  • , Ruth Houlihan
  • , Conor O'Mahony
  • , Russell Duane

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

The technology of Radio Frequency MicroElectroMechanical Systems (RF MEMS) capacitive switches is introduced. The switch operating principle, design and fabrication methods are described. The key reliability issues of switches are discussed and some experimental data demonstrated. Moreover, initial experimental data on the influence of the ambient temperature and gamma radiation on the switch actuation voltage are presented.

Original languageEnglish
Title of host publicationRAD 2012 - 1st International Conference on Radiation and Dosimetry in Various Fields of Research, Proceedings
EditorsGoran Ristic
PublisherRAD Association
Pages101-104
Number of pages4
ISBN (Electronic)9788661250637
Publication statusPublished - 2012
Event1st International Conference on Radiation and Dosimetry in Various Fields of Research, RAD 2012 - Nis, Serbia
Duration: 25 Apr 201227 Apr 2012

Publication series

NameRAD Conference Proceedings
Volume2012-April
ISSN (Electronic)2466-4626

Conference

Conference1st International Conference on Radiation and Dosimetry in Various Fields of Research, RAD 2012
Country/TerritorySerbia
CityNis
Period25/04/1227/04/12

Keywords

  • Charging
  • Mechanical Degradation
  • Radiation
  • Reliability
  • RF MEMS Switch
  • Temperature

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