Skip to main navigation Skip to search Skip to main content

Characterisation and passivation of interface defects in (1 0 0)-Si/SiO2/HfO2/TiN gate stacks

  • P. K. Hurley
  • , K. Cherkaoui
  • , S. McDonnell
  • , G. Hughes
  • , A. W. Groenland
  • Dublin City University
  • University of Twente

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Characterisation and passivation of interface defects in (1 0 0)-Si/SiO2/HfO2/TiN gate stacks'. Together they form a unique fingerprint.
Sort by

Engineering

Material Science