Characterisation of advanced multilayer de-embedding structures up to 50 GHz incorporating a novel validation standard

John A. O'Sullivan; Kevin G. McCarthy; Patrick J. Murphy

doi:10.1109/ICMTS.2006.1614276

Characterisation of advanced multilayer de-embedding structures up to 50 GHz incorporating a novel validation standard

John A. O'Sullivan
, Kevin G. McCarthy
, Patrick J. Murphy

School of Engineering and Architecture

University College Cork

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

Abstract

Modern multi-level metallisation schemes offer the possibility of many innovative structures for frequency characterisation and de-embedding. In this paper we perform a detailed charaterisation of several such structures up to 50 GHz and show their application to measurements of a high performance HBT device. We further propose a consistency check, by comparing independent DC and s-parameter measurements, to gain further confidence in the de-embedding operations.

Original language	English
Title of host publication	2006 International Conference on Microelectronic Test Structures - Digest of Technical Papers
Pages	59-64
Number of pages	6
DOIs	https://doi.org/10.1109/ICMTS.2006.1614276
Publication status	Published - 2006
Event	2006 International Conference on Microelectronic Test Structures - Austin, TX, United States Duration: 6 Mar 2006 → 9 Mar 2006

Publication series

Name	IEEE International Conference on Microelectronic Test Structures
Volume	2006

Conference

Conference	2006 International Conference on Microelectronic Test Structures
Country/Territory	United States
City	Austin, TX
Period	6/03/06 → 9/03/06

Access to Document

10.1109/ICMTS.2006.1614276

Cite this

O'Sullivan, J. A., McCarthy, K. G., & Murphy, P. J. (2006). Characterisation of advanced multilayer de-embedding structures up to 50 GHz incorporating a novel validation standard. In 2006 International Conference on Microelectronic Test Structures - Digest of Technical Papers (pp. 59-64). Article 1614276 (IEEE International Conference on Microelectronic Test Structures; Vol. 2006). https://doi.org/10.1109/ICMTS.2006.1614276

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title = "Characterisation of advanced multilayer de-embedding structures up to 50 GHz incorporating a novel validation standard",

abstract = "Modern multi-level metallisation schemes offer the possibility of many innovative structures for frequency characterisation and de-embedding. In this paper we perform a detailed charaterisation of several such structures up to 50 GHz and show their application to measurements of a high performance HBT device. We further propose a consistency check, by comparing independent DC and s-parameter measurements, to gain further confidence in the de-embedding operations.",

author = "O'Sullivan, \{John A.\} and McCarthy, \{Kevin G.\} and Murphy, \{Patrick J.\}",

year = "2006",

doi = "10.1109/ICMTS.2006.1614276",

language = "English",

isbn = "1424401674",

series = "IEEE International Conference on Microelectronic Test Structures",

pages = "59--64",

booktitle = "2006 International Conference on Microelectronic Test Structures - Digest of Technical Papers",

note = "2006 International Conference on Microelectronic Test Structures ; Conference date: 06-03-2006 Through 09-03-2006",

}

O'Sullivan, JA, McCarthy, KG & Murphy, PJ 2006, Characterisation of advanced multilayer de-embedding structures up to 50 GHz incorporating a novel validation standard. in 2006 International Conference on Microelectronic Test Structures - Digest of Technical Papers., 1614276, IEEE International Conference on Microelectronic Test Structures, vol. 2006, pp. 59-64, 2006 International Conference on Microelectronic Test Structures, Austin, TX, United States, 6/03/06. https://doi.org/10.1109/ICMTS.2006.1614276

Characterisation of advanced multilayer de-embedding structures up to 50 GHz incorporating a novel validation standard. / O'Sullivan, John A.; McCarthy, Kevin G.; Murphy, Patrick J.
2006 International Conference on Microelectronic Test Structures - Digest of Technical Papers. 2006. p. 59-64 1614276 (IEEE International Conference on Microelectronic Test Structures; Vol. 2006).

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

TY - CHAP

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AU - McCarthy, Kevin G.

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AB - Modern multi-level metallisation schemes offer the possibility of many innovative structures for frequency characterisation and de-embedding. In this paper we perform a detailed charaterisation of several such structures up to 50 GHz and show their application to measurements of a high performance HBT device. We further propose a consistency check, by comparing independent DC and s-parameter measurements, to gain further confidence in the de-embedding operations.

UR - https://www.scopus.com/pages/publications/33749536257

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BT - 2006 International Conference on Microelectronic Test Structures - Digest of Technical Papers

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O'Sullivan JA, McCarthy KG, Murphy PJ. Characterisation of advanced multilayer de-embedding structures up to 50 GHz incorporating a novel validation standard. In 2006 International Conference on Microelectronic Test Structures - Digest of Technical Papers. 2006. p. 59-64. 1614276. (IEEE International Conference on Microelectronic Test Structures). doi: 10.1109/ICMTS.2006.1614276

Characterisation of advanced multilayer de-embedding structures up to 50 GHz incorporating a novel validation standard

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