Characterisation of HfO2 deposited by photo-induced chemical vapour deposition

  • Q. Fang
  • , J. Y. Zhang
  • , Z. M. Wang
  • , J. X. Wu
  • , B. J. O'Sullivan
  • , P. K. Hurley
  • , T. L. Leedham
  • , H. Davies
  • , M. A. Audier
  • , C. Jimenez
  • , J. P. Senateur
  • , Ian W. Boyd

Research output: Contribution to journal › Article › peer-review

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