Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
- Fabrice F.C. Duval
- , Stephen A. Wilson
- , Graham Ensell
- , Nicolas M.P. Evanno
- , Markys G. Cain
- , Roger W. Whatmore
- Cranfield University
- INNOS Limited
- Rolls-Royce
- National Physical Laboratory
- School of Industrial and Manufacturing Science
Research output: Other output › peer-review