@inproceedings{6d77cb92d521479bbed39831ad293133,
title = "Characterization of Nano channel Alumina for pattern transfer on silicon as part of a nanoimprint process",
abstract = "The suitability of Nano channel Alumina (NCA) as template for pattern transfer is studied as part of a nanoimprint process. Our investigation revealed that a commercially available NCA (Anodisc{\texttrademark} 13) is brittle in nature with high surface roughness but the roughness may be reduced by sputter coating the NCA with SiO2. We also report on characterization of the surface morphology of spin coated PMMA (Polymethylmethacrylate) film, which plays a vital role in the imprint process.",
keywords = "Nano channel Alumina (NCA), Nanoimprint, Nanostructure, PMMA, Roughness",
author = "Razeeb, \{K. M.\} and Rahman, \{I. Z.\} and Rahman, \{M. A.\}",
note = "Publisher Copyright: {\textcopyright} 2001 IEEE.; 1st IEEE Conference on Nanotechnology, IEEE-NANO 2001 ; Conference date: 28-10-2001 Through 30-10-2001",
year = "2001",
doi = "10.1109/NANO.2001.966431",
language = "English",
series = "Proceedings of the IEEE Conference on Nanotechnology",
publisher = "IEEE Computer Society",
pages = "266--271",
booktitle = "Proceedings of the 2001 1st IEEE Conference on Nanotechnology, IEEE-NANO 2001",
address = "United States",
}