Characterizing SU-8 waveguides coupled to site-controlled InGaAs QDs at cryogenic environments

Salvador A. Medina-Rangel; John O’Hara; Nicola Maraviglia; Artem S. Vorobev; Luca Colavecchi; Emanuele Pelucchi; Liam O’Faolain

doi:10.1117/12.3063883

Characterizing SU-8 waveguides coupled to site-controlled InGaAs QDs at cryogenic environments

Salvador A. Medina-Rangel
, John O’Hara
, Nicola Maraviglia
, Artem S. Vorobev
, Luca Colavecchi
, Emanuele Pelucchi
, Liam O’Faolain

University College Cork

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

Abstract

We present a fabrication process for integrating pyramidal site-controlled quantum dots (QDs) with polymer-based photonic integrated circuits (PICs), using SU-8 waveguides. We estimate the SU-8 thermos-optical coefficient at cryogenic temperatures by following the resonances of a SU-8 racetrack at 850 nm. We focus on its integration with QDs grown on pre-patterned GaAs substrates, which provide controlled emitter positions for scalable, deterministic coupling, with an emission at 850-870 nm. Simulations show over 20% coupling efficiency between the QDs and the SU-8 waveguide’s fundamental mode. After etching the GaAs substrate and exposing the QD pyramids, SU-8 waveguides are fabricated using electron-beam lithography. Cryogenic tests at 14 K reveal a ~7.5 nm blueshift in QD emission, with coupling efficiency improving from ~2% in multimode to ~10% in single-mode waveguides. These results demonstrate the potential of SU-8 waveguides for advancing quantum photonic platforms.

Original language	English
Title of host publication	Active Photonic Platforms, APP 2025
Editors	Ganapathi S. Subramania, Stavroula Foteinopoulou
Publisher	SPIE
ISBN (Electronic)	9781510690646
DOIs	https://doi.org/10.1117/12.3063883
Publication status	Published - 16 Sep 2025
Event	Active Photonic Platforms Conference, APP 2025 - San Diego, United States Duration: 3 Aug 2025 → 7 Aug 2025

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	13578
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Active Photonic Platforms Conference, APP 2025
Country/Territory	United States
City	San Diego
Period	3/08/25 → 7/08/25

Keywords

heterogeneous integration
polymer waveguides
quantum dots
SU-8
thermos-optic coefficient

Access to Document

10.1117/12.3063883

Cite this

Medina-Rangel, S. A., O’Hara, J., Maraviglia, N., Vorobev, A. S., Colavecchi, L., Pelucchi, E., & O’Faolain, L. (2025). Characterizing SU-8 waveguides coupled to site-controlled InGaAs QDs at cryogenic environments. In G. S. Subramania, & S. Foteinopoulou (Eds.), Active Photonic Platforms, APP 2025 Article 1357804 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 13578). SPIE. https://doi.org/10.1117/12.3063883

@inproceedings{26b04ee91f5a4bb3a29cca25554667a6,

title = "Characterizing SU-8 waveguides coupled to site-controlled InGaAs QDs at cryogenic environments",

abstract = "We present a fabrication process for integrating pyramidal site-controlled quantum dots (QDs) with polymer-based photonic integrated circuits (PICs), using SU-8 waveguides. We estimate the SU-8 thermos-optical coefficient at cryogenic temperatures by following the resonances of a SU-8 racetrack at 850 nm. We focus on its integration with QDs grown on pre-patterned GaAs substrates, which provide controlled emitter positions for scalable, deterministic coupling, with an emission at 850-870 nm. Simulations show over 20\% coupling efficiency between the QDs and the SU-8 waveguide{\textquoteright}s fundamental mode. After etching the GaAs substrate and exposing the QD pyramids, SU-8 waveguides are fabricated using electron-beam lithography. Cryogenic tests at 14 K reveal a \textasciitilde{}7.5 nm blueshift in QD emission, with coupling efficiency improving from \textasciitilde{}2\% in multimode to \textasciitilde{}10\% in single-mode waveguides. These results demonstrate the potential of SU-8 waveguides for advancing quantum photonic platforms.",

keywords = "heterogeneous integration, polymer waveguides, quantum dots, SU-8, thermos-optic coefficient",

author = "Medina-Rangel, \{Salvador A.\} and John O{\textquoteright}Hara and Nicola Maraviglia and Vorobev, \{Artem S.\} and Luca Colavecchi and Emanuele Pelucchi and Liam O{\textquoteright}Faolain",

year = "2025",

month = sep,

day = "16",

doi = "10.1117/12.3063883",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Subramania, \{Ganapathi S.\} and Stavroula Foteinopoulou",

booktitle = "Active Photonic Platforms, APP 2025",

address = "United States",

}

Medina-Rangel, SA, O’Hara, J, Maraviglia, N, Vorobev, AS, Colavecchi, L, Pelucchi, E & O’Faolain, L 2025, Characterizing SU-8 waveguides coupled to site-controlled InGaAs QDs at cryogenic environments. in GS Subramania & S Foteinopoulou (eds), Active Photonic Platforms, APP 2025., 1357804, Proceedings of SPIE - The International Society for Optical Engineering, vol. 13578, SPIE, Active Photonic Platforms Conference, APP 2025, San Diego, United States, 3/08/25. https://doi.org/10.1117/12.3063883

Characterizing SU-8 waveguides coupled to site-controlled InGaAs QDs at cryogenic environments. / Medina-Rangel, Salvador A.; O’Hara, John; Maraviglia, Nicola et al.
Active Photonic Platforms, APP 2025. ed. / Ganapathi S. Subramania; Stavroula Foteinopoulou. SPIE, 2025. 1357804 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 13578).

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

TY - GEN

T1 - Characterizing SU-8 waveguides coupled to site-controlled InGaAs QDs at cryogenic environments

AU - Medina-Rangel, Salvador A.

AU - O’Hara, John

AU - Maraviglia, Nicola

AU - Vorobev, Artem S.

AU - Colavecchi, Luca

AU - Pelucchi, Emanuele

AU - O’Faolain, Liam

PY - 2025/9/16

Y1 - 2025/9/16

N2 - We present a fabrication process for integrating pyramidal site-controlled quantum dots (QDs) with polymer-based photonic integrated circuits (PICs), using SU-8 waveguides. We estimate the SU-8 thermos-optical coefficient at cryogenic temperatures by following the resonances of a SU-8 racetrack at 850 nm. We focus on its integration with QDs grown on pre-patterned GaAs substrates, which provide controlled emitter positions for scalable, deterministic coupling, with an emission at 850-870 nm. Simulations show over 20% coupling efficiency between the QDs and the SU-8 waveguide’s fundamental mode. After etching the GaAs substrate and exposing the QD pyramids, SU-8 waveguides are fabricated using electron-beam lithography. Cryogenic tests at 14 K reveal a ~7.5 nm blueshift in QD emission, with coupling efficiency improving from ~2% in multimode to ~10% in single-mode waveguides. These results demonstrate the potential of SU-8 waveguides for advancing quantum photonic platforms.

AB - We present a fabrication process for integrating pyramidal site-controlled quantum dots (QDs) with polymer-based photonic integrated circuits (PICs), using SU-8 waveguides. We estimate the SU-8 thermos-optical coefficient at cryogenic temperatures by following the resonances of a SU-8 racetrack at 850 nm. We focus on its integration with QDs grown on pre-patterned GaAs substrates, which provide controlled emitter positions for scalable, deterministic coupling, with an emission at 850-870 nm. Simulations show over 20% coupling efficiency between the QDs and the SU-8 waveguide’s fundamental mode. After etching the GaAs substrate and exposing the QD pyramids, SU-8 waveguides are fabricated using electron-beam lithography. Cryogenic tests at 14 K reveal a ~7.5 nm blueshift in QD emission, with coupling efficiency improving from ~2% in multimode to ~10% in single-mode waveguides. These results demonstrate the potential of SU-8 waveguides for advancing quantum photonic platforms.

KW - heterogeneous integration

KW - polymer waveguides

KW - quantum dots

KW - SU-8

KW - thermos-optic coefficient

UR - https://www.scopus.com/pages/publications/105021490678

U2 - 10.1117/12.3063883

DO - 10.1117/12.3063883

M3 - Conference proceeding

AN - SCOPUS:105021490678

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Active Photonic Platforms, APP 2025

A2 - Subramania, Ganapathi S.

A2 - Foteinopoulou, Stavroula

PB - SPIE

T2 - Active Photonic Platforms Conference, APP 2025

Y2 - 3 August 2025 through 7 August 2025

ER -

Medina-Rangel SA, O’Hara J, Maraviglia N, Vorobev AS, Colavecchi L, Pelucchi E et al. Characterizing SU-8 waveguides coupled to site-controlled InGaAs QDs at cryogenic environments. In Subramania GS, Foteinopoulou S, editors, Active Photonic Platforms, APP 2025. SPIE. 2025. 1357804. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.3063883

Characterizing SU-8 waveguides coupled to site-controlled InGaAs QDs at cryogenic environments

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