@article{b236d47defe7423689777d4d7daffcb8,
title = "Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth",
author = "Pawlak, \{B. J.\} and R. Lindsay and R. Susdeanu and B. Dieu and L. Geenen and I. Hoflijk and O. Richard and R. Duffy and T. Clarysse and B. Brijs and W. Vandervorst and Dachs, \{C. J.J.\}",
year = "2004",
doi = "10.1116/1.1643053",
language = "English",
volume = "22",
pages = "297--301",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "1",
}