Compact electroabsorption modulators for photonic integrated circuits, using an isolated pedestal contact scheme

Research output: Contribution to journalArticlepeer-review

Abstract

We demonstrate a shallow ridge waveguide, lumped element electroabsorption modulator (EAM) based on AlInGaAs multiple quantum wells, operating with input powers up to 8 dBm. The device was isolated between two DC controlled sections, using angled etched slots in the waveguide, minimizing optical feedback, while also providing 40-KΩ resistance between devices. The EAM uses a planar isolated pedestal contact with a benzocyclobutene bridge, allowing for a small contact footprint of just 0.024 mm 2, while being suitable for flip-chip packaging. The parasitic capacitance was measured to be 19.6 fF, and the EAM has a f 3dB bandwidth of 42 GHz.

Original languageEnglish
Article number6099556
Pages (from-to)356-358
Number of pages3
JournalIEEE Photonics Technology Letters
Volume24
Issue number5
DOIs
Publication statusPublished - 2012

Keywords

  • Electroabsorption modulator (EAM)
  • Integrated optoelectronics
  • Optical device fabrication

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