Compact sub-micron focused laser beam using integrated Bessel phase control

Research output: Contribution to journalArticlepeer-review

Abstract

We report the integration of phase gratings directly onto the surface of red vertical cavity surface emitting lasers (VCSELs) by Focused Ion Beam etching. Gratings have been used to generate quasi Bessel beams. The fabricated devices show that a diffraction limited central spot can be formed above the surface of the device. The narrow spot has a full width at half maximum of 0.5μm at a distance of 2μm above the VCSEL surface. The compact device can be formed in arrays and can be considered for a large number of sensing applications such as an optical probe for biophotonics and in optical recording systems.

Original languageEnglish
Article number28
Pages (from-to)165-173
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5824
DOIs
Publication statusPublished - 2005
EventOpto-Ireland 2005: Nanotechnology and Nanophotonics - Dublin, Ireland
Duration: 5 Apr 20056 Apr 2005

Keywords

  • Diffractive Optical Elements (DOE)
  • Focused Ion Beam (FIB)
  • VCSEL

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